Applications

  • Vacuum sealing for 2½"- 10" OD tubing in the semiconductor industry

Specifications

  • Maximum temperature: 302°F (150°C)
  • Helium leakage testing to 1x10-8 Torr
  • Standards followed: ISO2681

Features

  • Each assembly contains two identical flanges and a centering ring assembly and is joined together by clamps
  • Centering ring keeps the flanges in line and prevents the O-ring from being pushed in by atmospheric pressure.
  • Multiple clamps must be used to ensure a sturdy connection
  • ISO fittings are compatible with other manufacturers' ISO-KF-QF vacuum flanges
  • All fittings are IPA cleaned and bagged in a controlled environment